The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 15, 2019
Filed:
Jun. 14, 2016
Applicant:
Mems Drive, Inc., Arcadia, CA (US);
Inventors:
Xiaolei Liu, South Pasadena, CA (US);
Kegang Huang, Fremont, CA (US);
Guiqin Wang, Arcadia, CA (US);
Matthew Ng, Rosemead, CA (US);
Benson Mai, Alhambra, CA (US);
Changgeng Liu, Arcadia, CA (US);
Assignee:
MEMS Drive, Inc., Arcadia, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
H02N 2/02 (2006.01); B81B 3/00 (2006.01); H01L 41/09 (2006.01);
U.S. Cl.
CPC ...
B81B 3/0062 (2013.01); H01L 41/0993 (2013.01); H02N 2/028 (2013.01); B81B 2203/019 (2013.01); B81B 2203/0109 (2013.01); B81B 2203/0163 (2013.01); B81B 2203/053 (2013.01);
Abstract
Electric connection flexures for moving stages of microelectromechanical systems (MEMS) devices are disclosed. The disclosed flexures may provide an electrical and mechanical connection between a fixed frame and a moving frame, and are flexible in the moving frame's plane of motion. In implementations, the flexures are formed using a process that embeds the two ends of each flexure in the fixed frame and moving frame, respectively.