The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 2019
Filed:
Dec. 27, 2017
Texas Instruments Incorporated, Dallas, TX (US);
Abbas Ali, Plano, TX (US);
Dhishan Kande, Dallas, TX (US);
Qi-Zhong Hong, Richardson, TX (US);
Shih Chang Chang, Allen, TX (US);
TEXAS INSTRUMENTS INCORPORATED, Dallas, TX (US);
Abstract
A method of fabricating integrated circuits (ICs) includes depositing a dielectric liner layer on a substrate including a semiconductor surface having a plurality of IC die formed therein each including functional circuitry including a plurality of interconnected transistors. A thin film resistor (TFR) layer including chromium (Cr) is deposited on the dielectric liner layer. The substrate is loaded into a hardmask layer deposition tool that includes a plasma source. The TFR layer is in-situ plasma pre-treated including flowing at least one inert gas and at least one oxidizing gas while in the hardmask layer deposition tool. A hardmask layer is deposited after the plasma pre-treating while remaining in the hardmask layer deposition tool. A pattern is formed on the hardmask layer, and the hardmask layer and TFR layer are etched stopping in the dielectric liner layer to form at least one resistor from the defined TFR layer.