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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10438823 B1

PDFFull Text
Date of Patent:
Oct. 08, 2019

Filed:

Aug. 04, 2014

Substrate treatment device

Applicant:

Aixtron SE, Herzogenrath, DE;

Inventor:

Daniel Brien, Aachen, DE;

Assignee:

AIXTRON SE, Herzogenrath, DE;

Attorney:

Ascenda Law Group, PC

Primary Examiner:

Dana Ross

Assistant Examiner:

Joseph M Baillargeon

Int. Cl.
CPC ...
H01L 21/67 (2006.01); C23C 16/30 (2006.01); C23C 16/458 (2006.01); C23C 16/46 (2006.01); C23C 16/52 (2006.01); C30B 25/10 (2006.01); C30B 25/16 (2006.01); G05D 23/19 (2006.01); H01L 21/687 (2006.01); H05B 1/02 (2006.01); H05B 6/06 (2006.01); H05B 6/10 (2006.01); C30B 29/40 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67103 (2013.01); C23C 16/301 (2013.01); C23C 16/4583 (2013.01); C23C 16/46 (2013.01); C23C 16/52 (2013.01); C30B 25/10 (2013.01); C30B 25/16 (2013.01); G05D 23/1917 (2013.01); H01L 21/67248 (2013.01); H01L 21/68764 (2013.01); H01L 21/68771 (2013.01); H05B 1/0233 (2013.01); H05B 6/06 (2013.01); H05B 6/105 (2013.01); C30B 29/40 (2013.01);
Abstract

A heating apparatus includes a plurality of zone heating apparatuses and a control apparatus. The reference variable of the control apparatus is a susceptor temperature. The controlled variable of the control apparatus is an actual temperature of the susceptor measured by a temperature sensor and the manipulated variable of the control apparatus is the total heating power fed into the heating apparatus. A heating power distributor receives the total heating power as an input variable and provides a zone heating power for each of the zone heating apparatuses as output variables. The sum of the zone heating powers corresponds to the total heating power and the zone heating powers have a specified ratio with respect to each other. In order to specify a robust control loop, the specified ratios are defined by distribution parameters, wherein at least one distribution parameter is a quotient of two zone heating powers.

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