The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 2019
Filed:
May. 08, 2015
Applicant:
Mitsubishi Gas Chemical Company, Inc., Tokyo, JP;
Inventors:
Assignee:
Mitsubishi Gas Chemical Company, Inc., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/30 (2006.01); C08G 8/12 (2006.01); C08G 8/14 (2006.01); C08G 8/16 (2006.01); C08G 8/18 (2006.01); C08G 8/24 (2006.01); C08G 10/02 (2006.01); C08G 12/02 (2006.01); C08G 18/02 (2006.01); G03F 7/039 (2006.01); G03F 7/038 (2006.01); H01L 21/027 (2006.01); C08G 8/04 (2006.01); G03F 7/16 (2006.01); G03F 7/20 (2006.01); G03F 7/32 (2006.01); G03F 7/38 (2006.01);
U.S. Cl.
CPC ...
G03F 7/039 (2013.01); C08G 8/04 (2013.01); C08G 8/12 (2013.01); C08G 8/14 (2013.01); C08G 8/16 (2013.01); C08G 8/18 (2013.01); C08G 8/24 (2013.01); C08G 10/02 (2013.01); C08G 12/02 (2013.01); C08G 18/02 (2013.01); G03F 7/004 (2013.01); G03F 7/0045 (2013.01); G03F 7/038 (2013.01); G03F 7/0382 (2013.01); G03F 7/162 (2013.01); G03F 7/168 (2013.01); G03F 7/2037 (2013.01); G03F 7/30 (2013.01); G03F 7/327 (2013.01); G03F 7/38 (2013.01); H01L 21/027 (2013.01);
Abstract
The resist material according to the present invention contains a compound represented by the following formula (1): wherein each Ris independently a monovalent group having an oxygen atom, a monovalent group having a sulfur atom, a monovalent group having a nitrogen atom, a hydrocarbon group, or a halogen atom; and each p is independently an integer of 0 to 4.