The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 08, 2019

Filed:

Oct. 13, 2015
Applicant:

Nanotronics Imaging, Inc., Cuyahoga Falls, OH (US);

Inventors:

Matthew C. Putman, Brooklyn, NY (US);

John B. Putman, Celebration, FL (US);

Julie A. Orlando, Copley, OH (US);

Joseph G. Bulman, Kent, OH (US);

Assignee:

NANOTRONICS IMAGING, INC., Cuyahoga Falls, OH (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 5/00 (2006.01); G02B 21/12 (2006.01); G02B 21/36 (2006.01);
U.S. Cl.
CPC ...
G02B 21/125 (2013.01); G02B 5/005 (2013.01); G02B 21/361 (2013.01); G02B 21/367 (2013.01);
Abstract

A process is provided for imaging a surface of a specimen with an imaging system that employs a BD objective having a darkfield channel and a bright field channel, the BD objective having a circumference. The specimen is obliquely illuminated through the darkfield channel with a first arced illuminating light that obliquely illuminates the specimen through a first arc of the circumference. The first arced illuminating light reflecting off of the surface of the specimen is recorded as a first image of the specimen from the first arced illuminating light reflecting off the surface of the specimen, and a processor generates a 3D topography of the specimen by processing the first image through a topographical imaging technique. Imaging apparatus is also provided as are further process steps for other embodiments.


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