The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 2019
Filed:
Dec. 28, 2015
Applicant:
Freescale Semiconductor, Inc., Austin, TX (US);
Inventor:
Jerome Romain Enjalbert, Tournefeuille, FR;
Assignee:
NXP USA, Inc., Austin, TX (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 15/125 (2006.01); G01P 15/18 (2013.01); G01P 15/08 (2006.01);
U.S. Cl.
CPC ...
G01P 15/125 (2013.01); G01P 15/18 (2013.01); G01P 2015/0831 (2013.01);
Abstract
A MEMS acceleration device for measurement of the acceleration along three axes. The device includes capacitors, which capacitance changes under the influence of an acceleration acting upon the device. The change of capacitance for acceleration parallel to the substrate are, normally used with distinct capacitors. This device combines capacitors for using the change in capacitance for sensing in two independent and different directions parallel to the substrate thereby reusing the capacitor. Thereby allowing shrinking of the device while maintaining substantially the same sensitivity.