The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 08, 2019

Filed:

Jan. 30, 2017
Applicant:

Dow Corning Corporation, Midland, MI (US);

Inventors:

Mark Loboda, Bay City, MI (US);

Roman Drachev, Midland, MI (US);

Darren Hansen, Midland, MI (US);

Edward Sanchez, Midland, MI (US);

Assignee:

DOW SILICONES CORPORATION, Midland, MI (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C30B 23/00 (2006.01); C30B 23/02 (2006.01); C30B 29/36 (2006.01); H01L 21/02 (2006.01); C23C 14/06 (2006.01); C23C 14/24 (2006.01); C23C 14/26 (2006.01); C23C 14/54 (2006.01); C30B 23/06 (2006.01); H01L 29/16 (2006.01);
U.S. Cl.
CPC ...
C30B 23/025 (2013.01); C23C 14/0635 (2013.01); C23C 14/243 (2013.01); C23C 14/26 (2013.01); C23C 14/542 (2013.01); C30B 23/005 (2013.01); C30B 23/066 (2013.01); C30B 29/36 (2013.01); H01L 21/02005 (2013.01); H01L 29/1608 (2013.01); Y10T 428/24273 (2015.01);
Abstract

A method of forming an SiC crystal including placing in an insulated graphite container a seed crystal of SiC, and supporting the seed crystal on a shelf, wherein cushion rings contact the seed crystal on a periphery of top and bottom surfaces of the seed crystal, and where the graphite container does not contact a side surface of the seed crystal; placing a source of Si and C atoms in the insulated graphite container, where the source of Si and C atoms is for transport to the seed crystal to grow the SiC crystal; placing the graphite container in a furnace; heating the furnace; evacuating the furnace; filling the furnace with an inert gas; and maintaining the furnace to support crystal growth to thereby form the SiC crystal.


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