The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 01, 2019

Filed:

Jul. 17, 2018
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Akio Ishikawa, Yokohama, JP;

Ken Ozawa, Yokohama, JP;

Kwang-Soo Kim, Pyeongtaek-si, KR;

Sean Park, Yongin-si, KR;

Mitsunori Numata, Yokohama, JP;

Assignee:

SAMSUNG ELECTRONICS CO., LTD., Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/00 (2006.01); G01N 21/88 (2006.01); G02B 27/42 (2006.01); G06T 7/00 (2017.01); G01N 21/956 (2006.01);
U.S. Cl.
CPC ...
G01N 21/8806 (2013.01); G01N 21/956 (2013.01); G02B 27/42 (2013.01); G06T 7/0002 (2013.01); G01N 2201/06 (2013.01); G06T 2207/10152 (2013.01);
Abstract

An imaging apparatus includes an illumination light source to output an illumination light, an illumination optical system to transmit the illumination light toward a sample, an imaging optical system to transmit light reflected from the sample, a stage to move the sample in a predetermined transfer direction, and a photographing unit to receive the reflected light. The imaging apparatus may include one or more diffraction grids located at conjugate focal planes of the sample. The operation of the photographing unit may be synchronized with a movement of the sample by the stage to obtain an image in accordance with a time delay integration method.


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