The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 01, 2019
Filed:
Feb. 02, 2016
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Eric Eva, Aalen, DE;
CARL ZEISS SMT GMBH, Oberkochen, DE;
Abstract
A method for loading a blank composed of fused silica with hydrogen, including loading the blank at a first temperature (T) and a first hydrogen partial pressure (p), and further loading the blank at a second temperature (T) which is different from the first temperature and at a second hydrogen partial pressure (p) which is different from the first hydrogen partial pressure. The first and second temperatures (T, T) are lower than a limit temperature (T) at which a thermal formation of silane in the fused silica of the blank commences. Also disclosed are a lens element produced from such a blank and a projection lens that includes at least one such lens element.