The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 24, 2019

Filed:

Mar. 01, 2017
Applicant:

Fujifilm Corporation, Tokyo, JP;

Inventor:

Shuji Hirano, Haibara-gun, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/038 (2006.01); G03F 7/039 (2006.01); G03F 7/20 (2006.01); G03F 7/32 (2006.01); G03F 7/38 (2006.01); C08F 220/04 (2006.01); C08F 220/18 (2006.01); C08F 220/64 (2006.01); C08F 220/68 (2006.01); C08F 222/02 (2006.01); C08F 220/06 (2006.01); G03F 7/16 (2006.01); C08F 220/28 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0045 (2013.01); C08F 220/04 (2013.01); C08F 220/06 (2013.01); C08F 220/18 (2013.01); C08F 220/64 (2013.01); C08F 220/68 (2013.01); C08F 222/02 (2013.01); G03F 7/0042 (2013.01); G03F 7/0046 (2013.01); G03F 7/0048 (2013.01); G03F 7/038 (2013.01); G03F 7/039 (2013.01); G03F 7/0395 (2013.01); G03F 7/0397 (2013.01); G03F 7/162 (2013.01); G03F 7/2004 (2013.01); G03F 7/2037 (2013.01); G03F 7/322 (2013.01); G03F 7/325 (2013.01); G03F 7/38 (2013.01); C08F 2220/282 (2013.01); C08F 2220/283 (2013.01);
Abstract

Provided are an active-light-sensitive or radiation-sensitive resin composition in which the sensitivity is excellent, and an active-light-sensitive or radiation-sensitive film, a pattern forming method, and a method for manufacturing an electronic device, each using the active-light-sensitive or radiation-sensitive resin composition. The active-light-sensitive or radiation-sensitive resin composition contains a resin (Ab) whose polarity is changed by the action of an acid, and a compound that generates an acid upon irradiation with active light or radiation, in which the resin (Ab) includes a metal ion, and the metal type of the metal ion is at least one of metal types belonging to Groups 1 to 10 and 13 to 16 (here, excluding Mg and Cs).


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