logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10421622 B1

PDFFull Text
Date of Patent:
Sep. 24, 2019

Filed:

Dec. 28, 2017

Floating conveyor and substrate processing apparatus

Applicant:

Shibaura Mechatronics Corporation, Yokohama-shi, JP;

Inventors:

Yuichi Imaoka, Yokohama, JP;

Akinori Iso, Yokohama, JP;

Assignee:

SHIBAURA MECHATRONICS CORPORATION, Yokohama-shi, JP;

Attorney:

Oblon, McClelland, Maier & Neustadt, L.L.P.

Primary Examiner:

Lynn E Schwenning

Int. Cl.
CPC ...
B65G 49/06 (2006.01); B65G 9/00 (2006.01); B65G 49/07 (2006.01); H01L 21/677 (2006.01); C03C 21/00 (2006.01); B65G 51/03 (2006.01);
U.S. Cl.
CPC ...
B65G 49/063 (2013.01); B65G 9/002 (2013.01); B65G 49/065 (2013.01); B65G 49/069 (2013.01); B65G 49/07 (2013.01); C03C 21/001 (2013.01); H01L 21/677 (2013.01); H01L 21/67784 (2013.01); B65G 51/03 (2013.01); B65G 2249/045 (2013.01); B65G 2812/16 (2013.01);
Abstract

According to one embodiment, a floating conveyor is configured to convey a substrate while floating the substrate. The floating conveyor includes a lower floating section and an upper floating section with a conveying path of the substrate therebetween. A plurality of floating blocks that constitute at least one of the lower floating section and the upper floating section are arranged to be separated by a space, and a floating block that constitutes the other is arranged to face the space.

Find Patent Forward Citations

Imaoka, Yuichi. (2019). Floating conveyor and substrate processing apparatus (U.S. Patent No. 10421622). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10421622

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…