The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 24, 2019

Filed:

Jun. 03, 2015
Applicant:

Scivax Corporation, Kanagawa, JP;

Inventors:

Hirosuke Kawaguchi, Kanagawa, JP;

Yutaka Taniguchi, Kanagawa, JP;

Yukimasa Saito, Tokyo, JP;

Masaki Sugiyama, Tokyo, JP;

Daisuke Matono, Tokyo, JP;

Satoru Tanaka, Kanagawa, JP;

Assignee:

SCIVAX CORPORATION, Kanagawa, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B29C 59/04 (2006.01); B29C 43/36 (2006.01); B29C 59/02 (2006.01); H01L 21/027 (2006.01); B29C 59/00 (2006.01); B29L 11/00 (2006.01);
U.S. Cl.
CPC ...
B29C 43/3697 (2013.01); B29C 43/361 (2013.01); B29C 59/002 (2013.01); B29C 59/02 (2013.01); B29C 59/022 (2013.01); B29C 59/04 (2013.01); H01L 21/027 (2013.01); B29C 2043/3613 (2013.01); B29C 2059/023 (2013.01);
Abstract

A roller-type depressing device, an imprinting device, and a roller-type depressing method which are capable of suppressing an uneven elastic deformation of a main roller, and which are also capable of depressing an object uniformly. A roller-type depressing device depresses an object, and includes a main roller having at least a surface formed of an elastic material, and depressing the object, a roller moving unit moving the main roller relative to the object, a pressure adjusting unit adjusting pressure applied to the object by the main roller, a pressure receiving stage receiving the pressure from the main roller via the object, an intermediate roller having at least a surface formed of a material with a larger elastic modulus than the elastic material, and supporting the main roller, and, a backup roller formed shorter in an axial direction than the main roller and the intermediate roller, and supporting the intermediate roller.


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