The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 17, 2019

Filed:

Aug. 20, 2015
Applicant:

Sumitomo Chemical Company, Limited, Tokyo, JP;

Inventors:

Taichiroo Konno, Hitachi, JP;

Hajime Fujikura, Mito, JP;

Michiko Matsuda, Arakawa-ku, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 29/38 (2006.01); H01L 21/02 (2006.01); C30B 25/08 (2006.01); H01L 29/20 (2006.01); H01L 29/207 (2006.01); H01L 29/04 (2006.01); H01L 29/36 (2006.01); C30B 25/14 (2006.01); C30B 29/40 (2006.01);
U.S. Cl.
CPC ...
H01L 21/0262 (2013.01); C30B 25/08 (2013.01); C30B 25/14 (2013.01); C30B 29/403 (2013.01); C30B 29/406 (2013.01); H01L 21/0254 (2013.01); H01L 21/02576 (2013.01); H01L 21/02581 (2013.01); H01L 29/045 (2013.01); H01L 29/2003 (2013.01); H01L 29/207 (2013.01); H01L 29/36 (2013.01);
Abstract

A nitride semiconductor template includes a substrate, and a chlorine-containing nitride semiconductor layer. The chlorine-containing nitride semiconductor layer contains an iron concentration of not higher than 1×10cm.


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