The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 17, 2019

Filed:

Sep. 26, 2014
Applicant:

Synopsys, Inc., Mountain View, CA (US);

Inventors:

Victor Moroz, Saratoga, CA (US);

Yong-Seog Oh, Pleasanton, CA (US);

Stephen Lee Smith, Mountian View, CA (US);

Michael C. Shaughnessy-Culver, Napa, CA (US);

Jie Liu, San Jose, CA (US);

Assignee:

SYNOPSYS, INC., Mountain View, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06F 17/50 (2006.01); H01L 29/66 (2006.01); H01L 29/78 (2006.01);
U.S. Cl.
CPC ...
G06F 17/5081 (2013.01); G06F 17/5009 (2013.01); G06F 17/5036 (2013.01); G06F 17/5063 (2013.01); H01L 29/66795 (2013.01); H01L 29/785 (2013.01);
Abstract

Roughly described, a system for estimating an effective channel length of a 3D transistor having a gate length below 20 nm involves estimating an effective volume of the channel and a cross-sectional area of the channel, and estimating the effective channel length as the ratio of effective volume to cross-sectional area. Preferably the effective volume is estimated as the sum of the Voronoi volumes within containing boundaries of the channel, excluding those volumes having a dopant concentration above the source/drain dopant concentration at the carrier injection point. The containing boundaries can be identified using geometry data describing the transistor, particularly the data identifying inner surfaces of the gate dielectric. The estimated effective channel length can be used in TCAD level analysis of the transistor and calculating characteristics of the transistor as needed for circuit simulation.


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