The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 17, 2019
Filed:
Sep. 14, 2016
Canon Kabushiki Kaisha, Tokyo, JP;
Seth J. Bamesberger, Austin, TX (US);
Yeshwanth Srinivasan, Austin, TX (US);
Philip D. Schumaker, Austin, TX (US);
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
Methods, systems, and apparatus, including computer programs encoded on a computer storage medium, for aligning a template and a substrate, the method including obtaining a moiré image based on an interaction of light between corresponding features of the template and the substrate, the moiré image including a plurality of moiré fringe strips; compressing each moiré fringe strip of the moiré image by an optical lens array based on a pixel height of an acquisition device, the acquisition device including one or more line scan cameras; processing the compressed moiré image by each of the line scan cameras of the acquisition device to determine a misalignment between the template and the substrate; and based on the determined misalignment, adjusting a relative positioning between the template and the substrate.