The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 17, 2019
Filed:
Nov. 29, 2018
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Jens Kugler, Aalen, DE;
Stefan Hembacher, Bobingen, DE;
Michaela Schmid, Kaltenbach, CH;
Bernhard Geuppert, Aalen, DE;
Burkhard Corves, Hergenrath, BE;
Martin Riedel, Augsburg, DE;
Martin Wahle, Munich, DE;
Mathias Huesing, Aachen, DE;
Michael Lorenz, Aachen, DE;
Tim Detert, Aachen, DE;
Marwène Nefzi, Ulm, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
An optical imaging arrangement includes an optical element unit, and an actuator device connected to the optical element unit and is configured to be connected to a support structure for supporting the optical unit. The actuator device is configured to: actively adjust, in an adjustment state, a position and/or an orientation of the optical unit with respect to the support structure in N degrees of freedom; and support the optical element unit in a statically overdetermined manner in at least one of the N degrees of freedom via a plurality of active first and second actuator components such that, in a holding state following the adjustment state, the first and second actuator components cause a parasitic residual load introduced into the optical element unit in the at least one of the N degrees of freedom.