The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 17, 2019
Filed:
Dec. 22, 2017
Applicant:
Malvern Panalytical B.v., Almelo, NL;
Inventors:
Igor Alexandrovich Makhotkin, Almelo, NL;
Sergey Yakunin, Almelo, NL;
Assignee:
Malvern Panalytical B.V., Almelo, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/201 (2018.01); G01N 23/20 (2018.01);
U.S. Cl.
CPC ...
G01N 23/20 (2013.01); G01N 2223/052 (2013.01); G01N 2223/61 (2013.01);
Abstract
A method of measuring properties of a thin film stack by GIXR divides the stack into sub-layers and represents the composition of each sub-layer by an number P. The numbers P represent the composition of each layer. For example, integers may represent pure material and fractional values represent mixtures of the adjacent pure materials. This representation is then used to fit to measured data and the best fit gives an indication of the material composition of each of the sub-layers and hence as a function of depth.