The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 17, 2019

Filed:

Feb. 24, 2016
Applicant:

Shanghai Micro Electronics Equipment (Group) Co., Ltd., Shanghai, CN;

Inventors:

Hanchuan Ji, Shanghai, CN;

Qingsheng Chen, Shanghai, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); F16C 29/02 (2006.01); H02K 33/18 (2006.01); F16C 32/06 (2006.01); H02K 1/27 (2006.01); H02K 41/03 (2006.01);
U.S. Cl.
CPC ...
F16C 29/025 (2013.01); F16C 32/0603 (2013.01); G03F 7/70758 (2013.01); G03F 7/70816 (2013.01); H02K 1/27 (2013.01); H02K 33/18 (2013.01); H02K 41/031 (2013.01);
Abstract

A magnetic gravity compensator comprises a stator (), a rotor (), a base () and an adjustment mechanism (). The stator () is disposed on the base (), and the rotor () is levitated with respect to the stator (). The stator () comprises a central cylindrical magnet () that is fixed to the base () by the adjustment mechanism () and consists of at least two arc magnets (). The adjustment mechanism () has a first end fixed to the base () and a second end securely connected to the at least two arc magnets (). The adjustment mechanism () is configured to drive the at least two arc magnets () to synchronously move radially with respect to a central axis of the central cylindrical magnet () so as to change a magnetic circuit between the central cylindrical magnet () and the rotor (), and thereby adjust a magnetic levitation force between the stator () and the rotor ().


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