The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 17, 2019

Filed:

Oct. 13, 2015
Applicant:

Thin Film Electronics Asa, Oslo, NO;

Inventors:

Yuichi Goto, Toyama, JP;

Masahisa Endo, Toyama, JP;

Gun Son, Toyama, JP;

Kentaro Negai, Funabashi, JP;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C01B 33/113 (2006.01); C08G 77/60 (2006.01); B01J 23/46 (2006.01); C01B 33/04 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
C01B 33/113 (2013.01); B01J 23/464 (2013.01); C01B 33/04 (2013.01); C08G 77/60 (2013.01); H01L 21/0217 (2013.01); H01L 21/02214 (2013.01); H01L 21/02282 (2013.01);
Abstract

A method of producing a silicon hydride oxide-containing organic solvent (coating solution) is provided with which a silicon hydride oxide coating film can be formed on a substrate. Using the silicon hydride oxide-containing organic solvent makes it unnecessary to place a coating solution in non-oxidizing atmosphere at the time of coating or to heat the substrate after coating because the silicon hydride oxide is formed in the coating solution before it is coated. The method includes blowing an oxygen-containing gas through an organic solvent containing a silicon hydride or a polymer thereof. The silicon hydride oxide may contain a proportion of (residual Si-H groups)/(Si-H groups before oxidation) of 1 to 40 mol %. The silicon hydride can be obtained by reacting a cyclic silane with a hydrogen halide in the presence of an aluminum halide, and reducing the obtained cyclic halosilane.


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