The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 10, 2019

Filed:

Jan. 02, 2018
Applicant:

Kyushu Institute of Technology, Fukuoka, JP;

Inventors:

Ichiro Omura, Fukuoka, JP;

Masahiro Tanaka, Fukuoka, JP;

Masanori Tsukuda, Fukuoka, JP;

Yamato Miki, Fukuoka, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01); H01L 21/336 (2006.01); H01L 21/332 (2006.01); H01L 29/739 (2006.01); H01L 29/423 (2006.01); H01L 21/265 (2006.01); H01L 29/49 (2006.01); H01L 21/28 (2006.01);
U.S. Cl.
CPC ...
H01L 29/66348 (2013.01); H01L 21/26513 (2013.01); H01L 21/28035 (2013.01); H01L 29/4236 (2013.01); H01L 29/42364 (2013.01); H01L 29/4916 (2013.01); H01L 29/7397 (2013.01);
Abstract

A method for fabricating a high-voltage insulated gate type bipolar semiconductor device by comparing to a reference structure of the same includes determining a width S of a mesa region in which the gate insulating film and the MOS transistor are formed, and a trench depth D, based on a scaling ratio K, in comparison with a second width and a second trench depth of the reference structure, and setting a cell width 2W of the high-voltage insulated gate type bipolar semiconductor device to be equal in length to a second length of the reference structure, the scaling ratio K being defined as K=Y/X, where X indicates a size of a target portion to be miniaturized in the high-voltage insulated gate type bipolar semiconductor device, and Y indicates a size of a target portion to be miniaturized in the reference structure.


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