The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 10, 2019
Filed:
Aug. 02, 2016
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Martin Endres, Koenigsbronn, DE;
Johannes Eisenmenger, Ulm, DE;
Stig Bieling, Aalen, DE;
Markus Hauf, Ulm, DE;
Lars Wischmeier, Aalen, DE;
Fabian Haacker, Aalen, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/42 (2006.01); G03F 7/20 (2006.01); G02B 19/00 (2006.01); G02B 26/08 (2006.01);
U.S. Cl.
CPC ...
G03F 7/702 (2013.01); G02B 19/0019 (2013.01); G02B 19/0095 (2013.01); G03F 7/70075 (2013.01); G03F 7/70116 (2013.01); G02B 26/0833 (2013.01);
Abstract
A method for illuminating an object field of a projection exposure apparatus includes providing a subset of first facets to be positioned in park positions, which are each spaced apart from an associated target position, but at most by a maximum distance.