The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 10, 2019

Filed:

Jan. 20, 2017
Applicant:

AZ Electronic Materials (Luxembourg) S.a.r.l., Luxembourg, LU;

Inventors:

Motoki Misumi, Otsu, JP;

Daishi Yokoyama, Kakegawa, JP;

Megumi Takahashi, Kakegawa, JP;

Toshiaki Nonaka, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/023 (2006.01); G03F 7/004 (2006.01); G03F 7/022 (2006.01); G03F 7/075 (2006.01); C08K 5/08 (2006.01); C08L 83/04 (2006.01); G03F 7/039 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0226 (2013.01); G03F 7/0045 (2013.01); G03F 7/0233 (2013.01); G03F 7/0757 (2013.01); C08K 5/08 (2013.01); C08L 83/04 (2013.01); G03F 7/0392 (2013.01);
Abstract

To provide a positive type photosensitive composition capable of forming a pattern of high resolution, of high heat resistance and of high transparency without emitting harmful volatile substances such as benzene, also capable of reducing pattern defects caused by development residues, by undissolved residues, or by reattached hardly-soluble trace left in pattern formation, and further capable of being excellent in storage stability. The present invention provides a positive type photosensitive siloxane composition comprising: a polysiloxane having a phenyl group, a diazonaphthoquinone derivative, a hydrate or solvate of a photo base-generator having a particular nitrogen-containing hetero-cyclic structure, and an organic solvent.


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