Pattern sorting method used in opc verification

Abstract

A pattern sorting method used in OPC verification, comprises the following steps: obtaining sizes of comparison areas of patterns and extracting pattern boundaries; processing pattern boundaries; cutting off all the pattern edges outside comparison areas; setting grid sizes for filtering; setting directions for pattern boundaries; pattern division processing: dividing each pattern into 4 blocks of an equal size; recalculating the apexes of pattern boundaries in each block; implementing coordinate transformation for each block; calculating block characteristic values for each block; implementing rotating, upward and downward mirroring or leftward and rightward mirroring adjustment for blocks in accordance with corresponding block characteristic values; calculating overall characteristic values of patterns in accordance with various block characteristic values. This method is capable of sorting patterns related to each other by rotations or mirroring as well as patterns having subtle differences between one another into the same categories of patterns, thereby reducing the number of verification results as well as difficulties in screening problems.