The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 10, 2019
Filed:
Apr. 20, 2017
Applicant:
United Microelectronics Corporation, Hsinchu, TW;
Inventors:
Chia-Wei Lee, Kaohsiung, TW;
Chang-Sheng Hsu, Hsinchu, TW;
Chih-Fan Hu, Taoyuan, TW;
Chin-Jen Cheng, Zhubei, TW;
Chang Hsin Wu, Zhudong Township, TW;
Assignee:
UNITED MICROELECTRONICS CORPORATION, Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 27/12 (2006.01);
U.S. Cl.
CPC ...
G01N 27/128 (2013.01);
Abstract
The present invention provides a structure of a gas sensor, comprising: a support, having a front side, a back side opposite to the front side, a cell region, and a peripheral region circling the cell region; a cavity, formed on the back side of the support in the cell region; a heater, disposed on the front side of the support covering the cavity; a sensing element, disposed on the heater; and a sealing layer, formed on the back side of the support covering inside the cavity.