The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 10, 2019

Filed:

Sep. 13, 2017
Applicant:

Applied Materials Israel Ltd., Rehovot OT, IL;

Inventors:

Saar Shabtay, Moshav Mishmeret, IL;

Moshe Amzaleg, Beer Sheva, IL;

Zvi Goren, Nes-Ziona, IL;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/88 (2006.01); G06T 7/00 (2017.01); G01N 21/95 (2006.01); G01N 21/84 (2006.01);
U.S. Cl.
CPC ...
G01N 21/8803 (2013.01); G01N 21/8851 (2013.01); G01N 21/9501 (2013.01); G06T 7/0004 (2013.01); G06T 7/0006 (2013.01); G01N 2021/8461 (2013.01); G01N 2021/8867 (2013.01); G06T 2207/10061 (2013.01); G06T 2207/30148 (2013.01);
Abstract

Examination system, method and computer-readable medium, the method comprising: processing by a processor using a first recipe at least one image comprised in images and metadata generated by an inspection tool and stored, to detect a first location set of first potential defects and attributes thereof; selecting and imaging part of the first location set with a review tool to obtain an image set; obtaining classification results of said first potential defects and determining a further recipe based thereon; processing the image using the further recipe for detecting a further location set of further defects; selecting part of the further location set; imaging the part with the review tool to obtain a further image set, and obtaining further classification results; and repeating determining the further recipe, processing the image, selecting and imaging part of the further location set, and obtaining further classification results, until a stopping criteria is met.


Find Patent Forward Citations

Loading…