The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 10, 2019
Filed:
Jun. 06, 2012
Applicants:
Maxim Pisarenco, Eindhoven, NL;
Irwan Dani Setija, Utrecht, NL;
Inventors:
Maxim Pisarenco, Eindhoven, NL;
Irwan Dani Setija, Utrecht, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 21/47 (2006.01); G06F 17/00 (2019.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G01N 21/47 (2013.01); G03F 7/705 (2013.01); G03F 7/70625 (2013.01); G03F 7/70633 (2013.01); G06F 17/00 (2013.01); G01N 21/4788 (2013.01);
Abstract
A method for calculating electromagnetic scattering properties of a finite periodic structure having a direction of periodicity is disclosed. The method numerically calculates electromagnetic scattering properties using spatial discretization in the direction of periodicity and numerically calculates electromagnetic scattering properties using spectral discretization in a direction orthogonal to the direction of periodicity.