The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 10, 2019
Filed:
May. 30, 2017
Applicant:
Shibaura Mechatronics Corporation, Yokohama-shi, Kanagawa, JP;
Inventors:
Jun Matsushita, Yokohama, JP;
Yuji Nagashima, Yokohama, JP;
Konosuke Hayashi, Yokohama, JP;
Kunihiro Miyazaki, Yokohama, JP;
Assignee:
SHIBAURA MECHATRONICS CORPORATION, Yokohama-Shi, Kanagawa, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 3/08 (2006.01); H01L 21/67 (2006.01); B08B 3/02 (2006.01);
U.S. Cl.
CPC ...
B08B 3/08 (2013.01); B08B 3/02 (2013.01); H01L 21/67028 (2013.01); H01L 21/67034 (2013.01); H01L 21/67051 (2013.01);
Abstract
A substrate processing devicehas a water removing unitand, when a solvent supply unitsupplies a volatile solvent to a surface of a substrate W, the water removing unitsupplies a water removing agent to the surface of the substrate W to promote replacement of the cleaning water on the surface of the substrate W with the volatile solvent.