The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 2019
Filed:
Nov. 29, 2017
Applicant:
Hermes Microvision, Inc., Hsinchu, TW;
Inventors:
Ehud Shaked, Netanya, IL;
Martinus Maassen, San Francisco, CA (US);
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/28 (2006.01); H01J 37/26 (2006.01); H01J 37/147 (2006.01); H01J 37/244 (2006.01);
U.S. Cl.
CPC ...
H01J 37/261 (2013.01); H01J 37/147 (2013.01); H01J 37/28 (2013.01); H01J 37/244 (2013.01); H01J 2237/2602 (2013.01);
Abstract
Systems and methods for conducting charged particle beam modulation are disclosed. According to certain embodiments, a charged particle beam apparatus generates a plurality of charged particle beams. A modulator may be configured to receive the plurality of charged particle beams and generate a plurality of modulated charged particle beams. A detector may be configured to receive the plurality of modulated charged particle beams.