The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 2019
Filed:
Apr. 14, 2016
Applicant:
Fei Company, Hillsboro, OR (US);
Inventors:
Ivan Lazic, Eindhoven, NL;
Eric Gerardus Theodoor Bosch, Eindhoven, NL;
Assignee:
FEI Company, Hillsboro, OR (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/22 (2006.01); H01J 37/28 (2006.01); H01J 37/20 (2006.01);
U.S. Cl.
CPC ...
H01J 37/222 (2013.01); H01J 37/20 (2013.01); H01J 37/28 (2013.01); H01J 2237/2007 (2013.01); H01J 2237/221 (2013.01); H01J 2237/2446 (2013.01); H01J 2237/2802 (2013.01); H01J 2237/2815 (2013.01);
Abstract
A method is presented for sub-surface imaging of a specimen in a charged particle microscope. A series of images, with individual members Iis collected, with a value of a beam parameter P varied for each image, thereby compiling a measurement set M={(In, Pn)}, with P being the focus position along the charged particle axis. The data for the images are recorded using signals from a segmented detector. The signals from segments combined and compiled to yield a vector field. Mathematical processing then deconvolves the vector field, resulting in depth-resolved imagery of the specimen.