The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 03, 2019

Filed:

Jul. 07, 2014
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventors:

Koichi Sentoku, Kawachi-gun, JP;

Yoshinori Ohsaki, Utsunomiya, JP;

Osamu Morimoto, Utsunomiya, JP;

Takahiro Matsumoto, Utsunomiya, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/58 (2006.01); G03F 7/20 (2006.01); G01D 5/244 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70775 (2013.01); G01D 5/24452 (2013.01); G03F 7/7085 (2013.01); G03F 7/70516 (2013.01); G03F 7/70533 (2013.01); G03F 7/70541 (2013.01); G03F 7/70725 (2013.01); G03F 7/70858 (2013.01);
Abstract

The present invention provides a method for calibrating an encoder which includes a scale and a light receiving unit configured to receive light reflected by the scale, and detects a change in relative position between the scale and the light receiving unit, the method comprising a measurement step of measuring a deformation amount of a surface shape of the scale, a specifying step of specifying, based on a measurement result in the measurement step, a range which includes a portion of a surface of the scale, where the deformation amount exceeds a threshold, and within which a detection value of the encoder is corrected, and a determination step of determining a correction value for correcting the detection value of the encoder within the range specified in the specifying step.


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