The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 03, 2019

Filed:

Sep. 06, 2017
Applicant:

Tokyo Ohka Kogyo Co., Ltd., Kawasaki-shi, JP;

Inventors:

Takashi Nagamine, Kawasaki, JP;

Tsuyoshi Nakamura, Incheon, KR;

Assignee:

TOKYO OHKA KOGYO CO., LTD., Kawasaki-Shi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/26 (2006.01); C08F 220/26 (2006.01); H01L 21/027 (2006.01); C08F 220/18 (2006.01); C08F 220/38 (2006.01); G03F 7/039 (2006.01); G03F 7/20 (2006.01); G03F 7/32 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0045 (2013.01); C08F 220/18 (2013.01); C08F 220/26 (2013.01); C08F 220/38 (2013.01); G03F 7/0046 (2013.01); G03F 7/0397 (2013.01); G03F 7/26 (2013.01); H01L 21/0274 (2013.01); G03F 7/20 (2013.01); G03F 7/32 (2013.01);
Abstract

A resist composition including a polymeric compound having 0 to 20 mol % of a structural unit containing a polar group-containing aliphatic hydrocarbon group, and an acid generator compound represented by general formula (b1-1) in which Rrepresents a hydrocarbon group having at least 1 hydroxy group as a substituent; Yrepresents a single bond or a divalent linking group containing an oxygen atom; Vrepresents a single bond, an alkylene group or a fluorinated alkylene group; Rrepresents a fluorine atom or a fluorinated alkyl group of 1 to 5 carbon atoms; M'represents an organic cation having a valency of m.


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