The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 03, 2019

Filed:

Jan. 26, 2018
Applicant:

Fei Company, Hillsboro, OR (US);

Inventors:

Rainer Daum, Wessling, DE;

Xaver Voegele, Munich, DE;

Assignee:

FEI COMPANY, Hillsboro, OR (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/64 (2006.01); G02B 21/14 (2006.01); G02B 21/16 (2006.01); G02B 27/58 (2006.01); G01N 21/45 (2006.01); G02B 21/06 (2006.01); G02B 21/08 (2006.01); G02B 21/18 (2006.01); G02B 21/36 (2006.01); G02B 21/00 (2006.01);
U.S. Cl.
CPC ...
G01N 21/6458 (2013.01); G01N 21/45 (2013.01); G02B 21/06 (2013.01); G02B 21/088 (2013.01); G02B 21/14 (2013.01); G02B 21/16 (2013.01); G02B 21/18 (2013.01); G02B 21/361 (2013.01); G02B 21/364 (2013.01); G02B 27/58 (2013.01); G02B 21/008 (2013.01); G02B 21/0056 (2013.01);
Abstract

A standing wave interferometric microscope is disclosed herein. An example microscope may include an illuminator, for illuminating a specimen with a standing wave of input radiation at an analysis location to cause the specimen to fluoresce, the specimen arranged in the analysis location, a pair of projection systems, arranged at opposite sides of the analysis location, coupled to collect at least a portion of the fluorescence and direct a corresponding pair of fluorescence light beams into a respective pair of inputs of an optical combining element, a wavefront modifier for producing astigmatism in at least one of the fluorescence light beams entering the optical combining element, and a detector for examining output light from said combining element.


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