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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10400336 B1

PDFFull Text
Expired
Date of Patent:
Sep. 03, 2019

Filed:

Oct. 05, 2015

Oxide precursor, oxide layer, semiconductor element, and electronic device, and method of producing oxide layer and method of producing semiconductor element

Applicants:

Japan Advanced Institute of Science and Technology, Ishikawa, JP;

Sumitomo Seika Chemicals Co., Ltd., Hyogo, JP;

Inventors:

Tatsuya Shimoda, Ishikawa, JP;

Satoshi Inoue, Ishikawa, JP;

Kazuhiro Fukada, Ishikawa, JP;

Kiyoshi Nishioka, Hyogo, JP;

Nobutaka Fujimoto, Osaka, JP;

Masahiro Suzuki, Hyogo, JP;

Assignees:

JAPAN ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY, Ishikawa, JP;

SUMITOMO SEIKA CHEMICALS CO., LTD., Hyogo, JP;

Attorney:

Buckley, Maschoff & Talwalkar LLC

Primary Examiner:

Elizabeth E Mulvaney

Int. Cl.
CPC ...
B32B 3/00 (2006.01); C23C 18/12 (2006.01); H01L 21/288 (2006.01); H01L 29/786 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
C23C 18/1216 (2013.01); C23C 18/12 (2013.01); C23C 18/1279 (2013.01); H01L 21/02244 (2013.01); H01L 21/02255 (2013.01); H01L 21/02565 (2013.01); H01L 21/02628 (2013.01); H01L 21/288 (2013.01); H01L 29/786 (2013.01);
Abstract

An aliphatic polycarbonate, an oxide precursor, and an oxide layer are provided, which are capable of controlling stringiness, when a thin film that can be employed for an electronic device or a semiconductor element is formed by a printing method. In an oxide precursor of the present invention, a compound of metal to be oxidized into a metal oxide is dispersed in a solution containing a binder (possibly including inevitable impurities) made of aliphatic polycarbonates, and an aliphatic polycarbonate having a molecular weight of 6000 or more and 400000 or less constitutes 80% by mass or more of all the aliphatic polycarbonates.

Find Patent Forward Citations

Shimoda, Tatsuya. (2019). Oxide precursor, oxide layer, semiconductor element, and electronic device, and method of producing oxide layer and method of producing semiconductor element (U.S. Patent No. 10400336). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10400336

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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