The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 03, 2019

Filed:

Aug. 16, 2013
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventor:

Wen-Huang Liao, Zhubei, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D 35/02 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
B01D 35/02 (2013.01); H01L 21/67017 (2013.01);
Abstract

A liquid supply system includes a container containing a liquid, a tank coupled to the container to receive the liquid from the container, and a dispensing mechanism coupled to the tank to receive the liquid to be dispensed. The dispensing mechanism comprises a filter configured to filter the liquid before dispensing. The filter comprises a first gas collection space configured to collect gas accompanying the liquid. The tank is controllably coupled to the first gas collection space of the filter to vent the collected gas from the filter to the tank.


Find Patent Forward Citations

Quick Actions:

Liao, Wen-Huang. (2019). Liquid supply system and method (U.S. Patent No. 10399018). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10399018

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…