The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 2019
Filed:
Feb. 15, 2017
Globalfoundries Singapore Pte. Ltd., Singapore, SG;
GLOBALFOUNDRIES SINGAPORE PTE. LTD., Singapore, SG;
Abstract
Device and method of configuring a device to process a wafer is disclosed. The device includes a wafer chuck configured to mount the wafer, a dry wafer processing chamber configured to enclose the wafer chuck, a humidity sensor configured to measure relative humidity (RH) at an outlet of the dry wafer processing chamber, a humidity controller coupled to the humidity sensor, the humidity controller being configured to detect a change in RH above a threshold, and a process chamber controller coupled to the humidity controller. The change is triggered by a leakage in deionized water used as a coolant for cooling the wafer chuck and the wafer during the processing. The process chamber controller is configured to trigger a shutdown of the processing of the wafer in response to the leakage.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile