The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 2019
Filed:
Nov. 21, 2018
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Lawrence Wong, San Jose, CA (US);
Kartik Ramaswamy, San Jose, CA (US);
Yang Yang, Los Gatos, CA (US);
Steven Lane, Porterville, CA (US);
Richard Fovell, San Jose, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 19/00 (2018.01); H01J 37/32 (2006.01); H01L 21/67 (2006.01); C23F 1/00 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32935 (2013.01); H01J 37/32082 (2013.01); H01J 37/32926 (2013.01); H01L 21/67253 (2013.01); C23F 1/00 (2013.01); H01J 37/32917 (2013.01); H01L 21/677 (2013.01);
Abstract
Plural sensors on an interior surface of a reactor chamber are linked by respective RF communication channels to a hub inside the reactor chamber, which in turn is linked to a process controller outside of the chamber.