The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 2019
Filed:
Jan. 23, 2017
Shanghai Micro Electronics Equipment (Group) Co., Ltd., Shanghai, CN;
Jiming Fan, Shanghai, CN;
Haijiang Wang, Shanghai, CN;
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD., Shanghai, CN;
Abstract
A scanning mirror monitoring system and method as well as a focusing and leveling system are disclosed. The scanning mirror monitoring system includes a simple harmonic motion detector unit and a signal processing unit (). The simple harmonic motion detector unit monitors a simple harmonic motion of a scanning mirror () and produces a simple harmonic signal. The signal processing unit () receives the simple harmonic signal and instructs a scanning mirror actuator unit () to adjust the amplitude and/or position of the scanning mirror () based on a variation found in the simple harmonic signal. The signal processing unit () identifies the variation by monitoring an optical intensity profile.