The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 2019
Filed:
Sep. 07, 2017
Nikon Corporation, Tokyo, JP;
Michael B. Binnard, Belmont, CA (US);
Paul Derek Coon, Redwood City, CA (US);
NIKON CORPORATION, , JP;
Abstract
An exposure apparatus () for transferring one or more features to a workpiece () includes an illumination source (A); (ii) a chuck () that retains the workpiece (); (iii) a chamber housing (A) that encircles the chuck and the workpiece; and (iv) a temperature controller () () that adjusts the temperature of at least one of the chuck () and the workpiece () so that a predetermined temperature differential () exists between the chuck () and the workpiece () before transferring the features to the workpiece ().
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile