The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 2019
Filed:
Nov. 26, 2018
Applicant:
Jsr Corporation, Minato-ku, JP;
Inventor:
Hitoshi Osaki, Tokyo, JP;
Assignee:
JSR CORPORATION, Minato-ku, JP;
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); H01L 21/311 (2006.01); G03F 7/40 (2006.01); G03F 7/038 (2006.01); C09D 133/06 (2006.01); H01L 21/3213 (2006.01); H01L 21/308 (2006.01); C08L 25/04 (2006.01); H01L 21/027 (2006.01); G03F 7/039 (2006.01); C09D 133/04 (2006.01); C08L 25/16 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0035 (2013.01); C09D 133/04 (2013.01); C09D 133/062 (2013.01); G03F 7/038 (2013.01); G03F 7/0397 (2013.01); G03F 7/40 (2013.01); G03F 7/405 (2013.01); H01L 21/0271 (2013.01); H01L 21/0273 (2013.01); H01L 21/3086 (2013.01); H01L 21/31144 (2013.01); H01L 21/32139 (2013.01);
Abstract
A composition includes two types of polymers each having a different weight average molecular weight. The two types of polymers are each a styrene polymer having a group which bonds to at least one end of a main chain and which includes at least one of a hydroxy group, a carboxy group, a sulfanyl group, an epoxy group, a cyano group, a vinyl group or a carbonyl group. A difference in weight average molecular weight between the two types of polymers is no less than 2,000 and no greater than 30,000.