The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 27, 2019

Filed:

Sep. 23, 2015
Applicant:

Carl Zeiss Smt Gmbh, Oberkochen, DE;

Inventors:

Markus Bauer, Oberkochen, DE;

Holger Muenz, Aalen, DE;

Assignee:

Carl Zeiss SMT GmbH, Oberkochen, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 27/28 (2006.01); G02B 27/12 (2006.01); G02B 5/30 (2006.01); F21V 9/14 (2006.01);
U.S. Cl.
CPC ...
G02B 27/285 (2013.01); F21V 9/14 (2013.01); G02B 5/3066 (2013.01); G02B 5/3075 (2013.01); G02B 5/3091 (2013.01); G02B 27/12 (2013.01); G02B 27/126 (2013.01); G02B 27/283 (2013.01);
Abstract

The disclosure provides to a birefringent polarizer assembly for spatially separating polarization states of a light beam, in particular in the spectral range below 300 nm. The assembly includes a first prism on the light input side and a further prism on the light output side, which are arranged along a principal light incidence direction. The first prism has a first light entrance surface and a first light exit surface. The further prism has a further light entrance surface, facing the first light exit surface, and a further light exit surface. The prisms in each case have an optical principal crystal axis oriented substantially perpendicularly to the principal light incidence direction. The crystal axes of two adjacent prisms are oriented perpendicularly to one another. A normal to the further light exit surface forms an angle not equal to 0° with the principal light incidence direction.


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