The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 20, 2019

Filed:

Feb. 13, 2018
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Kangguo Cheng, Schenectady, NY (US);

Ramachandra Divakaruni, Ossining, NY (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/786 (2006.01); H01L 29/66 (2006.01); H01L 29/51 (2006.01); H01L 29/423 (2006.01); H01L 29/78 (2006.01); H01L 21/225 (2006.01); H01L 21/324 (2006.01);
U.S. Cl.
CPC ...
H01L 29/78621 (2013.01); H01L 21/2252 (2013.01); H01L 21/324 (2013.01); H01L 29/42392 (2013.01); H01L 29/66492 (2013.01); H01L 29/66666 (2013.01); H01L 29/7827 (2013.01); H01L 29/78642 (2013.01); H01L 21/2255 (2013.01); H01L 29/517 (2013.01);
Abstract

A vertical transistor includes a gate structure interposed between a proximate spacer doped with a first dopant-type and a distal spacer doped with the first dopant-type. The proximate spacer is formed on an upper surface of a semiconductor substrate. At least one channel region extends vertically from the proximate doping source layer to the distal doping source layer. A proximate S/D extension region is adjacent the proximate spacer and a distal S/D extension region is adjacent the distal spacer. The proximate and distal S/D extension regions include dopants that match the first dopant-type of the proximate and distal doping sources.


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