The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 20, 2019

Filed:

Dec. 05, 2017
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Mona A. Ebrish, Albany, NY (US);

Oleg Gluschenkov, Tannersville, NY (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/78 (2006.01); H01L 21/02 (2006.01); H01L 21/265 (2006.01); H01L 29/267 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7845 (2013.01); H01L 21/0245 (2013.01); H01L 21/26506 (2013.01); H01L 21/26586 (2013.01); H01L 29/267 (2013.01); H01L 29/6659 (2013.01); H01L 29/7833 (2013.01);
Abstract

A method for reducing series resistance for transistors includes forming a conductive gate over and insulated from a semiconductor substrate, forming source and/or drain extension regions within the substrate and adjacent to respective source and/or drain regions, and forming source and/or drain regions within the substrate. The source and/or drain extension regions are formed from a material alloyed with a first dopant and a second dopant, the first dopant configured to increase a lattice structure of the material forming the source and/or drain extension regions.


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