The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 20, 2019

Filed:

Nov. 13, 2018
Applicant:

Infineon Technologies Ag, Neubiberg, DE;

Inventors:

Maria Cotorogea, Taufkirchen, DE;

Frank Wolter, Munich, DE;

Hans-Joachim Schulze, Taufkirchen, DE;

Franz-Josef Niedernostheide, Hagen am Teutoburger Wald, DE;

Yvonne Gawlina-Schmidl, Pullach, DE;

Assignee:

Infineon Technologies AG, Neubiberg, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/06 (2006.01); H01L 29/739 (2006.01); H01L 29/08 (2006.01); H01L 29/40 (2006.01); H01L 29/10 (2006.01); H01L 29/78 (2006.01); H01L 27/11521 (2017.01); H01L 27/105 (2006.01); H01L 27/115 (2017.01);
U.S. Cl.
CPC ...
H01L 29/7397 (2013.01); H01L 29/0623 (2013.01); H01L 29/0834 (2013.01); H01L 29/1095 (2013.01); H01L 29/407 (2013.01); H01L 29/7395 (2013.01); H01L 29/7813 (2013.01); H01L 27/105 (2013.01); H01L 27/115 (2013.01); H01L 27/11521 (2013.01);
Abstract

A semiconductor device includes: a drift region formed in a semiconductor substrate; a body region above the drift region; an active gate trench extending from a first main surface and into the body region and including a first electrode coupled to a gate potential; a source region formed in the body region adjacent to the gate trench and coupled to a source potential; a first body trench extending from the first main surface and into the body region and including a second electrode coupled to the source potential; and an inactive gate trench extending from the first main surface and into the body region and including a third electrode coupled to the gate potential. A conductive channel is present along the active gate trench when the gate potential is at an on-voltage, whereas no conductive channel is present along the inactive gate trench for the same gate potential condition.


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