The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 20, 2019
Filed:
May. 31, 2013
Entegris, Inc., Billerica, MA (US);
Bryan C. Hendrix, Danbury, CT (US);
John N. Gregg, Marble Falls, TX (US);
Scott L. Battle, Cedar Park, TX (US);
Donn K. Naito, Marble Falls, TX (US);
Kyle Bartosh, Whitehall, PA (US);
John M. Cleary, New Fairfield, CT (US);
Sebum Cheon, New Milford, CT (US);
Jordan Hodges, Cedar Park, TX (US);
ENTEGRIS, INC., Billerica, MA (US);
Abstract
Systems, reagent support trays, particle suppression devices, and methods are disclosed. In one aspect, a system includes a vaporizer vessel having one or more interior walls enclosing an interior volume and a plurality of reagent support trays configured to be vertically stackable within the interior volume. Each of the plurality of reagent support trays is configured to be vertically stackable within the interior volume to form a stack of reagent support trays. One or more of the plurality of reagent support trays is configured to redirect a flow of a gas passing between adjacent reagent support trays in the stack of reagent support trays to cause the flow of gas to interact with the source reagent material in a particular reagent support tray before passing into a next of the plurality of reagent support trays in the stack of reagent support trays.