The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 06, 2019

Filed:

Aug. 08, 2017
Applicant:

Etron Technology, Inc., Hsinchu, TW;

Inventor:

Li-Ping Huang, Taipei, TW;

Assignee:

Etron Technology, Inc., Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/265 (2006.01); H01L 21/822 (2006.01); H01L 27/108 (2006.01); H01L 29/66 (2006.01); H01L 29/78 (2006.01);
U.S. Cl.
CPC ...
H01L 21/26513 (2013.01); H01L 21/26586 (2013.01); H01L 21/822 (2013.01); H01L 27/10873 (2013.01); H01L 27/10876 (2013.01); H01L 27/10888 (2013.01); H01L 29/6659 (2013.01); H01L 29/66621 (2013.01); H01L 29/66659 (2013.01); H01L 29/7834 (2013.01); H01L 21/26553 (2013.01);
Abstract

A manufacturing method of dynamic random access memory (DRAM) with low leakage current includes forming a plurality of gates within a substrate of the DRAM; forming a plurality of drain/sources within the substrate of the DRAM by a first ion implantation; and forming a plurality of lightly doped drains under all of the plurality of drain/sources or partial drain/sources of the plurality of drain/sources by a second ion implantation after the plurality of drain/sources are formed. The plurality of lightly doped drains is used for reducing a leakage current within the DRAM, and the second ion implantation has a predetermined incident angle.


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