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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10366932 B1

PDFFull Text
Date of Patent:
Jul. 30, 2019

Filed:

Jun. 08, 2017

Method and system for wet chemical bath process

Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Inventors:

Chien-Chiang Lin, Tainan, TW;

Chung-Chen Yu, Tainan, TW;

Shih-Chuan Lin, Tainan, TW;

Zhi-Xioung Hu, Tainan, TW;

Chih-Hung Hsueh, Tainan, TW;

Assignee:

TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., Hsinchu, TW;

Attorney:

McClure, Qualey & Rodack, LLP

Primary Examiner:

Jack S Chen

Int. Cl.
CPC ...
H01L 21/66 (2006.01); H01L 21/311 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 22/26 (2013.01); H01L 21/31111 (2013.01); H01L 21/67057 (2013.01); H01L 21/67086 (2013.01); H01L 21/67253 (2013.01);
Abstract

A method for performing a wet chemical process over a semiconductor wafer is provided. The method includes moving the semiconductor wafer into a chemical solution. The method further includes detecting the concentration of at least one substance in the chemical solution at a plurality of preset time points. The method also includes removing the semiconductor wafer from the chemical solution, when the concentration of the substance is maintained at a fixed approximate value.

Find Patent Forward Citations

Lin, Chien-Chiang. (2019). Method and system for wet chemical bath process (U.S. Patent No. 10366932). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10366932

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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