The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 30, 2019
Filed:
Nov. 19, 2014
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Maarten Mathijs Marinus Jansen, Eindhoven, NL;
Juan Diego Arias Espinoza, Eindhoven, NL;
Johannes Peterus Henricus De Kuster, Heeze, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Primary Examiner:
Int. Cl.
CPC ...
G03F 1/62 (2012.01); G03F 1/24 (2012.01); G03F 1/66 (2012.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G03F 1/62 (2013.01); G03F 1/24 (2013.01); G03F 1/66 (2013.01); G03F 7/70983 (2013.01);
Abstract
An apparatus for manufacturing a pellicle, the apparatus comprising: a stressing assembly for stressing a film; and a substrate support for supporting a substrate, the stressing assembly and the substrate support being capable of relative movement so as to bring the substrate into contact with the film when the film is stressed.