The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 30, 2019
Filed:
Apr. 10, 2017
Adeka Corporation, Tokyo, JP;
Tomoharu Yoshino, Tokyo, JP;
Atsushi Sakurai, Tokyo, JP;
Tsubasa Shiratori, Tokyo, JP;
Masako Hatase, Tokyo, JP;
Hiroyuki Uchiuzou, Tokyo, JP;
Akihiro Nishida, Tokyo, JP;
ADEKA CORPORATION, Tokyo, JP;
Abstract
The present invention relates to an aluminum compound represented by general formula (I). The present invention also relates to a thin film-forming raw material that contains this aluminum compound. In general formula (I), Rand Reach independently denote a straight chain or branched alkyl group having 2-5 carbon atoms, and Rdenotes a methyl group or ethyl group. It is preferable for Rand Rto be ethyl groups. This compound has a low melting point, exhibits satisfactory volatility, has high thermal stability, and is suitable for use as a raw material used to form a thin film by a CVD method.