The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 30, 2019
Filed:
Oct. 16, 2014
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Jeffrey W. Anthis, San Jose, CA (US);
David Thompson, San Jose, CA (US);
Ravi Kanjolia, North Andover, MA (US);
Shaun Garrett, Wirral, GB;
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/18 (2006.01); C23C 16/455 (2006.01); C22C 22/00 (2006.01); C23C 16/34 (2006.01);
U.S. Cl.
CPC ...
C23C 16/18 (2013.01); C22C 22/00 (2013.01); C23C 16/34 (2013.01); C23C 16/45553 (2013.01);
Abstract
Methods are provided for deposition of films comprising manganese on surfaces using metal coordination complexes comprising an amidoimino-based ligand. Certain methods comprise exposing a substrate surface to a manganese precursor, and exposing the substrate surface to a co-reagent.