The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 30, 2019
Filed:
Apr. 24, 2017
Applicant:
Tokyo Ohka Kogyo Co., Ltd., Kawasaki-shi, JP;
Inventors:
Yuriko Shirai, Kawasaki, JP;
Ryusuke Uchida, Kawasaki, JP;
Assignee:
TOKYO OHKA KOGYO CO., LTD., Kawasaki-Shi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 3/08 (2006.01); H01L 21/02 (2006.01); C11D 7/50 (2006.01); C11D 7/32 (2006.01); C11D 11/00 (2006.01); H01L 21/3065 (2006.01); G03F 7/42 (2006.01); C11D 7/26 (2006.01); B08B 3/00 (2006.01); B08B 3/04 (2006.01); H01L 21/311 (2006.01);
U.S. Cl.
CPC ...
B08B 3/08 (2013.01); B08B 3/00 (2013.01); B08B 3/04 (2013.01); C11D 7/263 (2013.01); C11D 7/3209 (2013.01); C11D 7/50 (2013.01); C11D 7/5022 (2013.01); C11D 11/0047 (2013.01); G03F 7/425 (2013.01); H01L 21/0206 (2013.01); H01L 21/02057 (2013.01); H01L 21/30655 (2013.01); H01L 21/31133 (2013.01);
Abstract
A cleaning liquid which includes 3-alkoxy-3-methyl-1-butanol represented by the following general formula (1); at least one of diethylene glycol monomethyl ether and triethylene glycol monomethyl ether; and quaternary ammonium hydroxide: in which Rrepresents an alkyl group having 1 to 5 carbon atoms.